Glow Research - For All Your Plasma Needs

Auto Glow Plasma System ™

A plasma system for plasma ashing, plasma etching, surface cleaning, plasma surface preparation or plasma modification. Our capacitively-coupled plasma systems are used for surface modification, cleaning prior to: wire bonding, die attach, encapsulation, conformal coating, printing, optical plasma cleaning, optical microscopy, plasma modification of polymers and plasma sterilization. Plasma processing increases wettability, improves lubricity, enhances bonding and adhesion strength, promotes underfill adhesion and enables deposition of bio-compatible materials. The system is suitable for R&D centers, universities and laboratory facilities who will find the AutoGlow™ plasma system the perfect fit for their plasma needs. The AutoGlow™ can be used to remove organics from electron microscopy (EM) specimens and specimen holders, as well as many applications involving plasma chemistry.

Small, table-top system
300 Watts at 13.56 MHz for plenty of power
Chamber made of high purity quartz
Solid state electronics—no tubes
Proprietary solid state detector for quick tuning
Automatic tuning for efficient plasma processing
Pressure read out
Timer
Displays Forward, Reflected and RF set point
Optional Gas Control Module for up to three gas inputs

Uniform plasma for fast and efficient results
Proprietary RF generator and match network for minimal reflected power regardless of the power setting
Fully characterized system for repeatable results
Easy to understand—easy to operate
All electronics are on two plug in boards for easy repair
Start-up support
12 month warranty

The Auto Glow™ system is a tabletop plasma chemistry reactor designed to provide the medical, scientific, educational and microelectronics community with plasma technology at a moderate cost. The system is suitable for R&D centers, universities, and laboratory facilities, who will find the AutoGlow plasma system the perfect fit for their plasma needs.

New and updated design:

Small plasma systems for use in labs and other electronics manufacturing were first introduced in the mid 1970’s and have been used with little design change since that time. Glow Research™, has taken the best designs of the old systems, and update the AutoGlow™ with current technology, including our proprietary phase magnitude detector, that allows efficient plasma tuning—provides quick processing without the trouble of constantly adjusting to various sample loads.

The AutoGlow™ has solid state electronics, updated gas delivery options and technology that is expected by both users and safety personnel throughout the world. The chamber size is 147mm (5.8 in.) in diameter by 177 mm deep (7 in.) and is made of high purity quartz. The system and chamber are designed to increase uniformity and repeatability when compared to other table-top plasma systems.

The AutoGlow™ System comes with a 300 watt, 13.56 MHz solid state generator making the Auto Glow System the most efficient system of its kind on the market. The AutoGlow™ System is designed to efficiently breakdown gases introduced to the system creating reactive species that will quickly clean or modify the sample.

Contact Glow Research™ for information about any type of plasma reactor—small batch, large batch, R&D single substrate and production plasma systems. Glow Research™, LLC. also provides rebuilt plasma systems, parts and services for a variety of plasma systems with repair capability down to the component level.

Glow Research™ has taken over the world-wide responsibility for parts and service for several older units from March Plasma Systems, Inc. (March Plasmod, March Super Plasmod and March Jupiter systems).

Contact Information:
Glow Research 12014 S. 35th Ct. Phoenix, Arizona USA 85044
Phone: 480-621-8405 or gordonwhitlock@glowresearch.org
customerservice@glowresearch.org