In normal operation the engineer or operator would load the ST1200 process recipe, load the matching endpoint recipe from the Lightwind library, and then push the process start button.
All additional steps are automatic. If the process is repeated it is not necessary to reload the Lightwind recipe each time.
The Lightwind endpoint system interfaces to the ST1200 in two ways:
Optically, a fiber optic cable links the plasma emissions to a spectrometer
and therefore to the endpoint software.
Digitally, the ST1200 sends a digital “start” signal to Lightwind where a preselected process recipe is loaded and initialized to watch for an endpoint event. When endpoint is detected Lightwind
sends a digital “stop” signal to the tool notifying it the process is complete.