Please see the various links on the right of this page.
We also provide the parts and equipment necessary to maintain ours and other plasma cleaner systems that are no longer supported by their manufacturer.
Quartz and Aluminum Wafer Boats
Quartz and aluminum wafer boats for 4″ wafers. The aluminum wafer carrier holds a quantity of 20 4″ (100 mm) wafers. We can supply smaller or larger aluminum wafer boats as well. Click HERE for a quote, or to request more details. We supply a low profile quartz wafer boats for 4″ (100 mm) wafers. … [ Read More ]
March PX-1000 parts and control systems
Glow Research upgrades and rebuilds March PM-1000 and March PM-500 plasma systems. We replace the old and outdated control system with our touch screen control system. This allows Glow Research to properly support our rebuilt systems well into the future. We also supply RF generators, matching networks, chamber gaskets and most parts for the Nordson … [ Read More ]
March Plasmod and March PM-600 Parts
Glow Research can supply quartz parts for the March Plasmod, March Super Plasmod and the PM-600 plasma asher. Chamber gasket gasket seals are also available. Glow Research has worked with Nordson March to take over the support of the March Plasmod, March Super Plasmod, March PM600 and the Jupiter II and Jupiter III systems. We … [ Read More ]
Vacuum Hose and KF25 Connections
Glow Research supplies a 4′ reinforced vacuum hose line, clamps, flanges and all the fittings you need to start up your Glow Research plasma system and vacuum pump. These items are included if you purchase a vacuum pump with your Glow Research plasma system. These items can be purchased separately for $215. Includes 4′ reinforced … [ Read More ]
