MARCH AP-1000
The AP-1000 Plasma System with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP-1000 HTP optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.
– Rebuilt by Glow Research, and in great working condition—30 day warranty
– S/N P100257
– 600 watt solid state 13.56 MHz RF generator
– Internal RF matching network
– Automatic tuning
– Stainless steel chamber
– PLC controller with touch screen provides an intuitive graphical interface and real time process representation
– Flexible shelf architecture allows processing of a wide variety
of part carriers in either direct or downstream plasma mode
– Emergency shut-off button, located on the front panel, immediately terminates the gas flow and RF power. Safety interlocks prevent activation of RF power when the chamber door is open.
– Two Mass Flow Controllers (Porter)–rebuilt and calibrated by our partner Precision Flow Devices https://precisionflowlab.com/
– Vacuum pump can be quoted and supplied (40-50 cfm with Fomblin oil recommended)
– Glow Research has taken over the support and parts for the Nordson March Plasmod, March Super Plasmod, PM600, Jupiter II and Jupiter III RIE systems
March AP-1000 Chamber with Plasma
• The AP-1000 platform is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure. Full front access allows for convenient access to all interior components.
• The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays and wafer boats.
• The AP-1000 Plasma System with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP-1000 HTP optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.
MARCH AP-1000 software and touch screen control
• Dimensions Chamber: 457W x 610D x 457H mm (18W x 24D x 18H in),
• Volume 127 liters (7776 in³)
• Variable Electrode Configurations Direct, Downstream, HTP Wide, HTP Narrow,
• Number of Shelf Positions 14,Shelf Pitch 25.4mm (1 in) for 600W
• Power Supply 220V, 25A, 50/60 Hz, 3-Phase, 8AWG, 4-Wire, 380V, 25A, 50/60Hz, 3-Phase, 8 AWG, 5-Wire
March AP-1000 Chamber
Please contact us customerservice@glowresearch.org
