March PX-2400 Rebuilt with Genesis Software

MARCH PX-2400   Rebuilt with Genesis Software

• Rebuilt by Glow Research, and in great working condition—12 month warranty

NOTE:  We replace all of the old boards and upgrade with our own Software Control System–this allows us to fully support this great system with parts and upgrades. MARCH PX-2400   Rebuilt with Genesis Software

• 1,000 watt solid state 13.56 MHz RF generator ENI ACG10B  S/N 574, 220-240VAC
• Internal RF matching network (rebuilt and modified for performance)
• Automatic tuning
• Stainless steel chamber (helium leak checked)
• Flexible shelf architecture allows processing of a wide variety of parts in either direct or downstream plasma mode

• Emergency shut-off button, located on the front panel, immediately terminates the gas flow and RF power. Safety interlocks prevent activation of RF power when the chamber door is open.  Safety interlock has been added to the chamber door
• Two 1,000 sccm Mass Flow Controllers (Porter)–rebuilt and calibrated by our partner Precision Flow Devices https://precisionflowlab.com/
• Vacuum pump can be quoted and supplied (50 cfm with Fomblin oil recommended)
• Glow Research has taken over the support and parts for the Nordson March Plasmod, March Super Plasmod, PM600, Jupiter II and Jupiter III RIE systems.

 

• The PX-2400 system comes with its own table, requiring minimal floor space.
• The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays and wafer boats.
• The PX-2400 Plasma System with shelves combines the reliability and process quality of the PX-2400 system with the proven benefits a unique shelf design. The PX-2400 optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.

• Dimensions Chamber: 31.5” deep x 28.25” wide x 18” high
• Variable Electrode Configurations Direct, Downstream
• Number of Shelf Positions 14, Shelf Pitch 25.4mm (1 in)
• 2 Mass Flow Controllers (Porter), 100 sccm and 1,000 sccm (flow rates can be modified to Customer’s spec)
• Baratron gauge for pressure monitoring
• Vacuum valve
• Glow Research adds a throttle valve (butterfly valve) and the Glow Research software will allow the user to control the gas flow independent from chamber pressure.  This upgrade is required and expected on new plasma systems.
• Power: 200-240 VAC, 3 phase, 25A
• Purge Gas: 0.25 inch Swagelok compression fitting for  50-80 psi Nitrogen or clean dry air (CDA)
• MARCH PX-2400   Rebuilt with Genesis Software

New Glow Research Genesis touch screen software control for PX-1000 system

• Touchscreen / Touchscreen control
• System pre-process self-check (MFC’s, baratron, pressure, etc.)
• Multiple step recipes—easy to configure
• Adjustable gas stabilization times, confirm MFC linearity
• Data logging, store/download historical records
• Monitor RF on/off times, during process, pressure curves during process, pressure curves during process
• Stable Linux based OS and application software
• Glow Research adds a throttle valve (butterfly valve) and the Glow Research software will allow the user to control the gas flow independent from chamber pressure.  This upgrade is required and expected on new plasma systems.
• Pass-word lock out to make engineering changes to the system or software

Option:

• 50 cfm Fomblin oil vacuum pump 12 months warranty (6 month warranty for rebuilt pump)

MARCH PX-2400   Rebuilt with Genesis Software

Rebuilt Work:  removed Z-80 based CPU board, removed control board, test RF generator, replace short RF cable with 24 foot cable, add ground cables from frame to RF generator and frame to control box, added +24 VDC supply, add touchscreen, add fans for cooling, add USB thumb drive connection, add safety lockout to door and more.

Click HERE to see a video of the system/process software (bottom of page).