Nordson MARCH AP-600

Nordson MARCH AP600

• Inspected and tested by Glow Research, and in good working condition.
• S/N AP600284
• 600 watt solid state 13.56 MHz RF generator (inspected—good working order).
• Internal RF matching network (inspected—good working order).
• Automatic tuning (inspected—good working order).
• Stainless steel chamber (inspected and passed leak testing).
• PLC controller with touch screen provides an intuitive graphical interface and real time process display (inspected—good working order). Password included.
• Flexible shelf architecture allows processing of a wide variety of part carriers in either direct, or downstream plasma mode.
• Emergency shut-off button, located on the front panel, immediately terminates the gas flow and RF Safety interlocks prevent activation of RF power when the chamber door is open.
• Two Mass Flow Controllers (Porter)–rebuilt and calibrated by our partner Precision Flow Devices https://precisionflowlab.com/

• Vacuum pump can be quoted and supplied (30 cfm with Fomblin oil recommended)

 

The AP-600 bench-top plasma systems deliver exceptionally uniform plasma cleaning and treatment for semiconductor, microelectronic packaging and assembly, and medical device manufacturing R&D environments.

The AP-600 systems provide the following:

Durable, high-quality aluminum construction and fixtures.

Two removable and adjustable powered or grounded shelves for a wide range of piece-parts, components, and part carriers, including magazines, trays, and boats.  Nordson MARCH offers parts and optional electrode shelves for the AP600.

A compact, self-contained system chassis that houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system).  A upgraded isolation valve has been added to the back of the system.

An intuitive touchscreen control panel for real-time process monitoring.

Convenient facility hook-ups for periodic calibration requirements used in validation processes.

Designed for a wide range of process gases, including argon, oxygen, helium, and fluorinated gases.

• Maintenance access through an interlocked door or removable panels.
• Two standard electronic mass flow controllers for optimal gas control.

System is in our Tempe, AZ lab and can be inspected.  Contact:

Glow Research International

480-621-8405

www.glowresearch.org