Glow Research
Research and Production Plasma Cleaning Systems
Our systems report the RF power actually going into the chamber in 1 watt increments.
Glow Research System are used in Production as well as R&D, University; applications
Organic removal, photoresist removal, decap, bonding (PDMS), and FA applications.
High purity quartz chambers or anodized aluminum chambers are available.
At Glow Research we are extremely proud that our systems have
Contributed to advancements in the Scientific community, MEMS,
Biomedical and the Semiconductor industry
AutoGlow Plasma Systems
The AutoGlow plasma cleaning system has a quartz chamber and a variable 10-300 watt 13.56 MHz solid state generator. The system provides very efficient plasma process for lab and production applications. Automatic tuning. Adjust power in one watt increments. For use with O2, Ar, N2 or other gases.
GLOW Plasma Systems
The GLOW plasma system is designed for high reliability and affordable pricing (under $6,000 dollars). It Operates at 100 kHz, ----- no tuning is required! The GLOW is suitable for lab, university or production applications. It can perform a host of applications such as plasma cleaning, removing photoresist, prebond cleaning/conditioning, PDMS bonding or organic removal.
AutoGlow 200
AutoGlow 200 is designed for 8” (200mm) substrates or larger samples. 300 or 600 watt, 13.56 MHz system with adjustable power in one watt increments. Anodized aluminum chamber. Our AutoGlow 200LF (low frequency) system sells for as low as $18,900. Two shelves (one powered, one ground) and sized 8.375” x 15” (220 mm x 381 mm).
University | Production | R&D Applications
Glow Research makes plasma cleaning systems that are easy to use, extremely reliable and produce a plasma that will allow the user to easily complete the plasma process with the best results possible. Glow Research makes the entire system (RF generator, RF matching, control system, chamber and gas flow modules). Our systems are used in 3 shift/day production as well university/R&D applications. Our systems allow our Customer to attend to work they need to accomplish with the support of a reliable plasma cleaning or etching system.
Contact Us
Testing and Samples
