Ordering or request a quote: Send an e-mail here, Email Glow Research. Please let us know your application or what you are trying to accomplish–we have several systems to fit various needs and budgets. We will send you a detailed quote with options that you can choose to fit your particular needs. Feel free to call USA 480-621-8405 for any questions you may have.
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Here is a short overview of our various plasma table top plasma systems:
GLOW Plasma System: For surface modification, plasma cleaning, removing organics, pre-bonding applications (PDMS), microfluidics removing photoresist. One flowmeter for control of gas. 5″ x 5″ x 7.5″ deep anodized aluminum chamber. Includes sample carrier with two shelves (powered and ground shelf). 100 kHz, power is set at 75 watts, no tuning required.
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AutoGlow-200/300: Designed for 200mm wafers or 8″ square substrates or smaller. Can do RIE or plasma processing and has an anodized aluminum chamber. Designed for fluorine chemistry (CF4) as well as oxygen and argon. Used for photoresist removal, organic removal, plasma cleaning, PDMS bonding, pre-bonding, and surface modification. 13.56 MHz, 300 watts, Reactive Ion Etching (RIE) or plasma processing. 600 watt RF generator is sold as an option. We also offer the 13.56 MHz AutoGlow 300 (with a larger chamber), the AutoGlow 300LF (larger chamber with a 100 kHz RF generator). We manufacture several of these systems at a time to keep the cost down.
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AutoGlow: Quartz chamber with gas distribution for improved process uniformity. Up to 6″ wafer or substrates. For surface modification, plasma cleaning, removing organics, pre-bonding applications (PDMS), microfluidics removing photoresist and FA applications. 13.56 MHz, 10-300 watts (adjustable in one watt increments), automatic tuning–for plasma processing.
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AutoGlow 1000: AutoGlow 1000 is a large chamber production plasma system with multiple shelves for direct plasma or RIE processing. Each sample shelf is 13.75” (35mm) x 16.75” (42.8 cm deep). Up to four MFC’s can be used. The AutoGlow 1000 is controlled by our advanced touch screen control system. Made for your 24/7 production needs. Click HERE for more information and to see the video.
Vacuum Pumps: For all processing with oxygen, we recommend vacuum pumps with Fomblin type oil or scroll pumps with no oil. If a vacuum pump is ordered with the system, we will include the pump line and all KF flanges and fittings. Click HERE for more information on vacuum pumps.
Orders are taken over the phone in the USA 480-621-8405 or by Email customerservice@glowresearch.org.
Ordering or request a quote. Glow Research plasma systems are securely crated in a padded and reinforced crate that conforms to international shipping standards. Your Glow Research plasma system will always be protected in shipment. We have recommended carriers with experience shipping plasma systems internationally.
Average delivery time for any GLOW or AutoGlow plasma systems are typically 6-8 weeks after receipt of order. GLOW plasma systems are usually in stock.