Plasma Systems Parts and Service

Plasma systems parts and service. Glow Research provides the parts and equipment necessary to maintain our plasma systems, and other plasma cleaning systems that are no longer supported by their manufacturer. We have upgraded several Nordson March PX-1000, PX-500, PX-250 and PM-600 systems. We supply March Plasmod and March PM-600 quartz chambers.

Plasma systems parts and service

Please see the various links on the right of this page.

For information on a software control systems upgrade click HERE

March PX-250, PX-500 and PX-1000 parts

March PX-250, PX-500 and PX-1000 parts. Electrode shelves are available for the PX-500 and the PX-1000 plasma systems. Also available are the perforated electrode shelves and the solid floating shelves needed for downstream plasma processing. Silicon chamber door gaskets are also available for these systems. For more information on silicon chamber door gaskets for the … [ Read More ]

Swagelok Valve for Two Gas Inputs

Swagelok Valve for Two Gas Inputs. Connects to the back of a Glow Research Plasma System. Allows the user to run one gas, two gases or a combination of both gases. The flow is regulated into the chamber by the rotameter on the front of the Glow Research Plasma System. Contact Glow Research HERE if … [ Read More ]

Quartz and Aluminum Wafer Boats

Quartz and aluminum wafer boats for 4″ wafers. The aluminum wafer carrier holds a quantity of 20 4″ (100 mm) wafers. We can supply smaller or larger aluminum wafer boats as well. Click HERE for a quote, or to request more details. We supply a low profile quartz wafer boats for 4″ (100 mm) wafers. … [ Read More ]

Contact Angle Measurement and Links (nanoscience and other)

RF Generators

March PX-1000 parts and control systems

Glow Research upgrades and rebuilds March PM-1000 and March PM-500 plasma systems. We replace the old and outdated control system with our touch screen control system. This allows Glow Research to properly support our rebuilt systems well into the future. We also supply RF generators, matching networks, chamber gaskets and most parts for the Nordson … [ Read More ]

March PX-1000 and March PX-500 parts (control systems, gaskets, RF generators, and repair)

March Plasmod and March PM-600 Parts

Glow Research can supply quartz parts for the March Plasmod, March Super Plasmod and the PM-600 plasma asher. Chamber gasket gasket seals are also available. Glow Research has worked with Nordson March to take over the support of the March Plasmod, March Super Plasmod, March PM600 and the Jupiter II and Jupiter III systems. We … [ Read More ]

Vacuum Hose and KF25 Connections

Glow Research supplies a 4′ reinforced vacuum hose line, clamps, flanges and all the fittings you need to start up your Glow Research plasma system and vacuum pump. These items are included if you purchase a vacuum pump with your Glow Research plasma system. These items can be purchased separately for $215. Includes 4′ reinforced … [ Read More ]