Research and Production Plasma Cleaning Systems

USA - 480-621-8405

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AutoGlow 1000

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AutoGlow Plasma Systems

The AutoGlow plasma system has a quartz chamber and has a variable 10-300 watt, 13.56 MHz solid state generator. The AutoGlow 200 can be used for oxygen, CF4 plasma or RIE applications. Can be used for 200mm wafers or 8” square substrates. Variable 10-600 watt Find out more

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941 South Park Lane | Tempe, AZ 85281 USA

USA - 480-621-8405
customerservice@glowresearch.org

Ordering Information

Find out how easy it is to order from Glow Research. Orders can be taken by Email or phone (480-621-8405). We have several systems to fit various needs and budgets.

Testing and Samples

Glow Research will run samples on a contract basis or for clients interested in the eventual purchase of a new or rebuilt system. Contact us for more information.

Copyright © 2023 Glow Research | 941 South Park Lane | Tempe, AZ 85281 United States | USA - 480-621-8405 · customerservice@glowresearch.org
AutoGlow and OptiGlow are registered trademarks of Glow Research.
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