water drop test
Oxygen Plasma System
AutoGlow by Glow Research
Located: Chapman Hall – Cleanroom
Uses: The AutoGlow system is used for:
Oxygen plasma is generated using a 300 W RF power supply that can operate at powers between 10 – 300 W. The unit can handle 4” wafers or smaller.
Commonly used materials: Glass, Metals, Semiconductors, Polymers
Applications:
Stripping of photoresist
Ultra-cleaning of surfaces
Wetability alteration
Sample preparation for electron microscopy
Treatment of surfaces to improve adhesion
click here for the UNC Instrument Lab
click here for details on the Glow Research AutoGlow
Uses: The AutoGlow oxygen plasma system is used for etching and cleaning surfaces or for surface activation processes. An oxygen plasma is generated using a 300 W RF power supply that can operate at powers between 10 – 300 W. The unit can handle 4” wafers or smaller.
Commonly used materials: Glass, Metals, Semiconductors, Polymers
Applications:
Stripping of photoresist
Ultra-cleaning of surfaces
Wetability alteration
Sample preparation for electron microscopy
Treatment of surfaces to improve adhesion
click here to see more information on the AutoGlow system
