
water drop test
Oxygen Plasma System
AutoGlow by Glow Research
Located: Chapman Hall – Cleanroom
Uses: The AutoGlow system is used for:
Oxygen plasma is generated using a 300 W RF power supply that can operate at powers between 10 – 300 W. The unit can handle 4” wafers or smaller.
Commonly used materials: Glass, Metals, Semiconductors, Polymers
Applications:
Stripping of photoresist
Ultra-cleaning of surfaces
Wetability alteration
Sample preparation for electron microscopy
Treatment of surfaces to improve adhesion
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click here for details on the Glow Research AutoGlow
Uses: The AutoGlow oxygen plasma system is used for etching and cleaning surfaces or for surface activation processes. An oxygen plasma is generated using a 300 W RF power supply that can operate at powers between 10 – 300 W. The unit can handle 4” wafers or smaller.
Commonly used materials: Glass, Metals, Semiconductors, Polymers
Applications:
Stripping of photoresist
Ultra-cleaning of surfaces
Wetability alteration
Sample preparation for electron microscopy
Treatment of surfaces to improve adhesion
click here to see more information on the AutoGlow system