The University of Central Florida (UCF) has a AutoGlow plasma system and the Glow Research system is mentioned in this paper: Passsive Hydrogen Senors Using Orthogonal Frequency Coded Acoustic Wave Devices. A in-situ film resistivity sensor was developed using a parallel electrode resistor. On page 10:
Jacqueline H. Hines PhD – ASR&D PI
Donald C. Malocha, PhD – UCF PI
Eric U. Borguet, PhD – Temple University PI
“Through repeated experimentation, trial and error, it was found that the die’s substrate preparation prior to film deposition was critical to reproducing films. After dicing, the die is cleaned repeatedly with acetone and methanol soaked clean-room grade swabs. After attaching the wires, the die are cleaned once more and with acetone and methanol swabs and plasma cleaned with O2 at 150Watts for 1 min in an AutoGlow® Plasma System.