AutoGlow with Gas Control Module
Plasma Cleaning of Gold in a Glow Research AutoGlow prior to deposition: See page 10 of this paper: http://www.asrdcorp.com/files/ASRDR1006F.pdf
(parallel electrode resistor, PER) specifications are as follows
• Electrode Material: Gold
• Bus bar dimensions: 5mm x 5mm x 0.18μm
• Electrode Material: Gold
• Separation between electrodes: 0.3mm
• Substrate: 3″ ST Quartz wafers
Gold was chosen as the electrode material due to its slow oxidation at room temperature and its ability to be soldered. This solder-ability in conjunction with the application of silver paint was instrumental in obtaining a stable electrical and mechanical contact.
Through repeated experimentation, trial and error, it was found that the die’s substrate preparation prior to film deposition was critical to reproducing films.
After dicing, the die is cleaned repeatedly with acetone and methanol soaked clean-room grade swabs. After attaching the wires, the die are cleaned once more and with acetone and methanol swabs and plasma cleaned with Oxygen at 150 Watts for 1 min in an AutoGlow Plasma System.
Passive Hydrogen Sensors Using Orthogonal Frequency Coded Acoustic Wave Device
Jacqueline H. Hines PhD – ASR&D PI
Donald C. Malocha, PhD – UCF PI
Eric U. Borguet, PhD – Temple University PI
For more information on the Glow Research AutoGlow:
https://www.glowresearch.org/autoglow-plasma-system
