Plasma Cleaning of Surfaces

Plasma Cleaning of Surfaces with oxygen plasma system chemistry and different plasma cleaning systems configurations are discussed:

We have had the pleasure of working with Abe Belkind and consider him to be an authority on plasma cleaning.  Here is a paper by Abe Belkind and Sophia Gershman,  PLASMA CLEANING of SURFACES:

http://www.jhv-vac.com/image/pdf/Plasma%20Cleaning%20of%20Surfaces_en.pdf

In this paper Abe and Sophia discuss:

• removal of contaminants from surfaces (the surface may contain layers of chemically and physically absorbed water)
• plasma cleaning with oxygen plasma system chemistry
• surface roughness of some metal surfaces can exceed tens of hundreds of nm
• contamination layer on a metal strip can be more than 1 um thick
• surface cleaning is a multi-step process consisting of the generation of active (cleaning) species, their transport to the surface, the reactions on the surface, and the ultimate removal of the reaction products from the surface
• plasmas provide a low temperature environment using electrical energy rather than heat to promote chemical reactions
• the atom removal rate (R) nm/sec  is given by: R = YV (Jq)
• different plasma chamber configurations and plasma sources are discussed
• DC, RF, microwave, plasma jets and other plasma system configuration are discussed

Plasma cleaning with oxygen plasma system chemistry is based on the plasma-wall interactions, the interaction of ions, electrons, and radicals with the surface.  Plasma processing offers several advantages over conventional chemical cleaning methods.  Plasmas provide a low temperature environment using electrical energy rather than heat to promote chemical reactions. Plasmas eliminate many of the problems associated with wet chemistry.  Plasmas are environmentally friendly with no liquid waste, and hence no expensive disposal.  Using plasma is a simple process requiring little or no supervision.  The plasma cleaning rate usually does not exceed 0.4mm/hour.  Therefore, current industrial practices call for plasma cleaning only as the last step in a cleaning process aimed to achieve a pristine surface.

Contact Abe Belkind at:  http://www.plasmapotential.com/

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